方形氮化镓自支撑衬底
Free-standing GaN Substrates（Square）
产品型号 Item | JF-061UA-M6 | JF-061NA-M6 | ||
尺寸 Size (mm) | (10.0±0.5)×(15.0±0.5); Customized | |||
厚度 Thickness (μm) | 400±25 | 400±25 | ||
总厚度变化 TTV (μm) | ≤10 | |||
弯曲度 BOW (μm) | ≤10 | |||
表面粗糙度 RMS (nm) | ≤0.2 (10μm×10μm) | |||
晶向 Orientation | C-plane(0001) off angle toward M-axis 0.6±0.2° C-plane(0001) off angle toward A-axis 0.3±0.25° | |||
导电类型 Conduction Type | Un-doped | N-type | ||
电阻率 (300K) Resistivity (Ω·cm） | ≤0.5 | ≤0.05 | ||
位错密度 Dislocation Density (cm-2) | ≤9×106 | |||
有效面积 Useable Surface Area | ＞90% | |||
包装 Package | Packaged in individual containers in a class 100 clean room environment. | |||
