Size (mm)

(10.0±0.5)×(15.0±0.5);

Customized

Thickness (μm)

330±25

430±25

TTV (μm)

≤10

BOW (μm)

≤10

RMS (nm)

Front surface：RMS≤0.2 (10μm×10μm)；

Back surface：Optically polished

Orientation

C-axis(0001)±1.0°

Conduction Type

Un-doped N-type

N-type

High-doped N-type

Resistivity (Ω·cm）

≤0.5

≤0.05

≤0.01

Dislocation Density (cm^-2)

1～5×10⁶

Useable Surface Area

＞90%

Package

Packaged in individual containers in a class 100 clean room environment.