方形氮化鎵自支撐襯底
Free-standing GaN Substrates（Square）
產品型號 Item | JF-061UA-M6 | JF-061NA-M6 | ||
尺寸 Size (mm) | (10.0±0.5)×(15.0±0.5); Customized | |||
厚度 Thickness (μm) | 400±25 | 400±25 | ||
總厚度變化 TTV (μm) | ≤10 | |||
彎曲度 BOW (μm) | ≤10 | |||
表面粗糙度 RMS (nm) | ≤0.2 (10μm×10μm) | |||
晶向 Orientation | C-plane(0001) off angle toward M-axis 0.6±0.2° C-plane(0001) off angle toward A-axis 0.3±0.25° | |||
導電類型 Conduction Type | Un-doped | N-type | ||
電阻率 (300K) Resistivity (Ω·cm） | ≤0.5 | ≤0.05 | ||
位錯密度 Dislocation Density (cm-2) | ≤9×106 | |||
有效面積 Useable Surface Area | ＞90% | |||
包裝 Package | Packaged in individual containers in a class 100 clean room environment. | |||
