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No.
Patent No
Patent Name
License Announcement Day
-
1
200410009840.0
Large area and low power laser stripping method of epitaxial layer of GaN base
2009-02-18
-
2
200610144316.3
A method of making free-standing GaN substrate
2009-06-24
-
3
200610167605.5
The method of making high quality GaN think film on heterogeneous substrates.
2009-06-24
-
4
200810225953.2
The method of Laser Lift-Off to separate GaN and sapphire substrate without dama.
2012-01-25
-
5
201010617286.X
A method and devices of hydride vapor phase epitaxy (HVPE) for multiple large su.
2012-06-13
-
6
201010617788.2
Improved method of Laser Lift-Off which can eliminate residual stress of GaN epi.
2012-06-13
-
7
201120349715.X
A flange component using multi-pipeline liquid to cool down and control temperat.
2012-06-13
-
8
201120349762.4
A new filter unit that can be used for online cleaning without disassembly
2012-06-13
-
9
201120355244.3
A structure connecting quartz tube and metal
2012-06-13
-
10
201010618011.8
A device and method of annealing
2012-07-11
-
11
201010617807.1
The method that an independent MO source system can provide MO source to the sem.
2012-07-18
-
12
201220004381.7
An automatic feeding equipment
2012-10-10
-
13
201110142242.0
Slit type multi-gas transport nozzle structure
2012-11-21
-
14
201110276973.4
A mount for the semiconductor epitaxial system
2013-01-09
-
15
201220221883.5
A control system for vapor phase epitaxy equipment
2013-02-06
-
16
201220320302.3
A wafer tray
2013-03-13
-
17
201220320305.7
A device to hit up the gas to high temperature rapidly
2013-03-13
-
18
201110102031.4
A patterned substrate
2013-04-10
-
19
201220573278.4
Multi-cavity step processing device for vapor phase epitaxy
2013-06-19
-
20
201010617738.4
A treatment method for ammonium chloride exhaust and its equipment
2013-07-24
-
21
201010617750.5
The method of producing patterned substrates of GaN
2013-08-28
-
22
201110453183.9
A single-contact rotating boat
2013-10-30
-
23
200910136458.9
An integrated equipment for Laser Lift-Off and cutting
2014-03-12
-
24
201330477184.7
A kind of frog light
2014-06-11
-
25
201320727092.4
A safe and efficient wafer jig
2014-07-10
-
26
201210151216.9
The method of using MOVPE technology to grow high brightness LED with asymmetric.
2014-08-27
-
27
201420457076.2
A heating device that is easy to be changed and can use mixed ways of heating
2015-01-21
-
28
201420262140.1
A supporting base for grinding and polishing wafers
2015-01-28
-
29
201210306671.1
A method for preparing free-standing substrate from GaN single crystal materials..
2015-02-18
-
30
201420562470.2
A separate supporting base for the epitaxial growth
2015-02-18
-
31
201210319877.8
A device and method for unloading wafers during high temperature growth
2015-04-22
-
32
201210533750.6
A method for producing invisible structured substrate
2015-04-22
-
33
201210274906.3
A laser frog light with safety function keeping the distance between cars
2015-05-20
-
34
201210309119.8
A boat suitable for GaN epitaxial material industrialization
2015-05-20
-
35
201210559376.7
A liquid level control device used in high temperature environment
2015-07-22
-
36
201520162543.3
A GaN-based composite substrate with patterned synchronization during the transf
2015-07-29
-
37
201520162977.3
A GaN-based composite substrate with arrayed transfer
2015-08-19
-
38
201520264359.X
A GaN-based composite substrate containing a diffusion barrier layer
2015-08-19
-
39
201310012395.2
A square nozzle structure for vapor phase epitaxy of a material
2015-09-16
-
40
201520213249.0
A new type of MOCVD spray head cleaning brush head
2015-09-16
-
41
201210559395.X
A simple wafer jig
2015-10-07
-
42
201210303314.X
Method 2 used to improve the surface temperature field of substrate wafer during
2015-11-04
-
43
201310318526.X
A liquid-assisted laser Life-Off method
2015-11-25
-
44
201210068033.0
A method for preparing and making composite substrate for GaN growth
2016-01-20
-
45
201210559456.2
A jig with three chuck heads specially used for wafer
2016-01-27
-
46
201210559378.6
High temperature resistant skid clamping jig used in semiconductor and microelec
2016-02-10
-
47
201310394554.X
A hydride gas deposition device and method for improving the thickness distribut
2016-02-10
-
48
201520798181.7
A jig for quartz casing installation
2016-03-02
-
49
201410028993.3
A reactor design and method for vapor phase epitaxy of nitride semiconductor mat
2016-04-27
-
50
201520962682.4
An auxiliary jig for large diameter quartz outer sleeve installation
2018-04-27
-
51
201521002074.5
An installation device for holding a quartz cavity
2016-04-27
-
52
201310012409.0
A fan shaped nozzle structure for vapor phase epitaxy
2016-05-11
-
53
201310542018.X
A front drive logistics field control rod
2016-05-11
-
54
201410031343.4
A reactor for hydride vapor phase epitaxy
2016-05-18
-
55
201210559394.5
A multi-chuck wafer jig
2016-06-01
-
56
201310601124.0
A controlled precursor channel
2016-06-01
-
57
201210255792.8
A composite substrate with a protective layer against metal diffusion
2016-06-27
-
58
201210119613.8
A method for preparing and making patterned sapphire substrate for GaN growth
2016-06-29
-
59
200910136457.4
Solid-state laser stripping equipment and stripping methods
2018-06-29
-
60
201410398217.2
A device for stabilizing conversion rate
2016-08-24
-
61
201410196612.2
A dual channel nozzle structure with uniformly distributed controllable reactant
2016-09-28
-
62
201620797442.8
A device for improving the efficiency of converting hydrogen chloride into GaN
2017-01-18
-
63
201410004051.1
A new type of patterned substrate and its preparation method
2017-02-08
-
64
201720349115
A hydride vapor phase epitaxial graphite boat structure
2017-12-29
-
65
201510656861.X
A linkage adjustable heat insulation device and its application method
2018-01-09
-
66
201610017711.9
A single crystal growth apparatus and method for nitrogen compounds
2018-01-23